filename:TLM__MD_M017_S060_TARGET_EXPOSE_SCAN___COUNT_170002.DAT
scan_file:SCAN_MD_M017_S060_2015-06-13T081842Z_TGT11
sw_ver:664
start_time:"2015-06-13 08:18:42.166145"
end_time:"2015-06-13 17:59:50.177716"
duration:"9:41:08.011571"
channel:ZS
tip_num:14
lin_pos:-4.8468757152666511
tip_offset:-9.7825017166386274
wheel_pos:176
target:11
target_type:SOLGEL
x_orig:34004
y_orig:34004
xsteps:64
x_step:328
x_step_nm:1250.9395199999999
xlen_um:80.060129279999998
ysteps:64
y_step:328
y_step_nm:1250.9395199999999
ylen_um:80.060129279999998
z_step:4.0
z_ret:22883
z_ret_nm:3752.8120000000004
x_dir:L_H
y_dir:L_H
fast_dir:X
scan_type:DYN
exc_lvl:3
ac_gain:1
x_closed:False
y_closed:False
aborted:False
dummy:False
res_amp:9.999847409781033
set_pt:1.999847409781033
fadj:9.4996566720073243
ctrl_image:True
mag_phase:False
work_pt:8.999786374857635
set_pt_per:20.0
work_pt_per:-89.99923704890517
xy_settle:100
z_settle:100
x_orig_um:-49.812566356638627
y_orig_um:40.030064639999999