filename:TLM__MD_M017_S060_TARGET_EXPOSE_SCAN___COUNT_170002.DAT
scan_file:SCAN_MD_M017_S060_2015-06-13T190537Z_TGT14
sw_ver:664
start_time:"2015-06-13 19:05:37.179026"
end_time:"2015-06-14 13:24:26.200905"
duration:"18:18:49.021879"
channel:ZS
tip_num:9
lin_pos:-0.4412909132524605
tip_offset:-0.50909819180587623
wheel_pos:224
target:14
target_type:SOLGEL
x_orig:50183
y_orig:34004
xsteps:256
x_step:31
x_step_nm:118.22904
xlen_um:30.266634239999998
ysteps:512
y_step:31
y_step_nm:118.22904
ylen_um:60.533268479999997
z_step:4.0
z_ret:1802
z_ret_nm:295.52800000000002
x_dir:L_H
y_dir:L_H
fast_dir:X
scan_type:DYN
exc_lvl:4
ac_gain:7
x_closed:False
y_closed:False
aborted:False
dummy:False
res_amp:7.8834210727092398
set_pt:6.3065537499046309
fadj:6.7005416952773329
ctrl_image:True
mag_phase:False
work_pt:7.0950188187909315
set_pt_per:80.0
work_pt_per:-89.99923704890517
xy_settle:50
z_settle:50
x_orig_um:21.164954528194123
y_orig_um:40.030064639999999