filename:TLM__MD_M017_S061_TARGET_EXPOSE_SCAN___COUNT_170003.DAT
scan_file:SCAN_MD_M017_S061_2015-06-17T113412Z_TGT03
sw_ver:664
start_time:"2015-06-17 11:34:12.284728"
end_time:"2015-06-17 18:38:18.293173"
duration:"7:04:06.008445"
channel:ZS
tip_num:10
lin_pos:-1.3220416571297779
tip_offset:14.927100022888704
wheel_pos:48
target:3
target_type:CAL
x_orig:43988
y_orig:43988
xsteps:256
x_step:4
x_step_nm:15.25536
xlen_um:3.9053721599999998
ysteps:256
y_step:4
y_step_nm:15.25536
ylen_um:3.9053721599999998
z_step:4.0
z_ret:372
z_ret_nm:61.008000000000003
x_dir:L_H
y_dir:L_H
fast_dir:X
scan_type:DYN
exc_lvl:3
ac_gain:0
x_closed:False
y_closed:False
aborted:False
dummy:False
res_amp:7.7103837644007021
set_pt:1.9272144655527581
fadj:7.3246356908522161
ctrl_image:False
mag_phase:False
work_pt:3.8551330557430044
set_pt_per:25.000381475547417
work_pt_per:-49.999237048905165
xy_settle:100
z_settle:100
x_orig_um:12.974413942888704
y_orig_um:1.9526860799999999