filename:TLM__MD_M017_S061_TARGET_EXPOSE_SCAN___COUNT_170003.DAT
scan_file:SCAN_MD_M017_S061_2015-06-17T194832Z_TGT02
sw_ver:664
start_time:"2015-06-17 19:48:32.294571"
end_time:"2015-06-18 06:54:13.307826"
duration:"11:05:41.013255"
channel:ZS
tip_num:10
lin_pos:-1.3220416571297779
tip_offset:14.927100022888704
wheel_pos:32
target:2
target_type:CAL
x_orig:42580
y_orig:42580
xsteps:256
x_step:15
x_step_nm:57.207599999999999
xlen_um:14.645145599999999
ysteps:256
y_step:15
y_step_nm:57.207599999999999
ylen_um:14.645145599999999
z_step:4.0
z_ret:1395
z_ret_nm:228.78
x_dir:L_H
y_dir:L_H
fast_dir:X
scan_type:DYN
exc_lvl:3
ac_gain:0
x_closed:False
y_closed:False
aborted:False
dummy:False
res_amp:7.7030594338902878
set_pt:1.9253833829251545
fadj:7.3176165407797358
ctrl_image:False
mag_phase:False
work_pt:3.8514709463688575
set_pt_per:25.000381475547417
work_pt_per:-49.999237048905165
xy_settle:100
z_settle:100
x_orig_um:7.604527222888704
y_orig_um:7.3225727999999997