filename:TLM__MD_M017_S061_TARGET_EXPOSE_SCAN___COUNT_170003.DAT
scan_file:SCAN_MD_M017_S061_2015-06-18T225232Z_TGT04
sw_ver:664
start_time:"2015-06-18 22:52:32.326908"
end_time:"2015-06-19 18:15:21.350061"
duration:"19:22:49.023153"
channel:ZS
tip_num:8
lin_pos:0.44098573281452658
tip_offset:-60.024967574578497
wheel_pos:64
target:4
target_type:SILICON
x_orig:34004
y_orig:34004
xsteps:256
x_step:82
x_step_nm:312.73487999999998
xlen_um:80.060129279999998
ysteps:256
y_step:82
y_step_nm:312.73487999999998
ylen_um:80.060129279999998
z_step:4.0
z_ret:4291
z_ret_nm:703.72400000000005
x_dir:L_H
y_dir:L_H
fast_dir:Y
scan_type:CON
exc_lvl:6
ac_gain:3
x_closed:False
y_closed:False
aborted:False
dummy:False
res_amp:0.17669947356374457
set_pt:0.088197146562905324
fadj:0.15014877546349278
ctrl_image:False
mag_phase:False
work_pt:0.159028178076802
set_pt_per:50.000762951094835
work_pt_per:-89.99923704890517
xy_settle:50
z_settle:50
x_orig_um:-100.05503221457849
y_orig_um:40.030064639999999