filename:TLM__MD_M017_S061_TARGET_EXPOSE_SCAN___COUNT_170003.DAT
scan_file:SCAN_MD_M017_S061_2015-06-21T162821Z_TGT01
sw_ver:664
start_time:"2015-06-21 16:28:21.405276"
end_time:"2015-06-22 05:45:27.421148"
duration:"13:17:06.015872"
channel:ZS
tip_num:15
lin_pos:-5.5603875791561759
tip_offset:250.07173647669237
wheel_pos:16
target:1
target_type:CAL
x_orig:34004
y_orig:34004
xsteps:128
x_step:164
x_step_nm:625.46975999999995
xlen_um:80.060129279999998
ysteps:128
y_step:164
y_step_nm:625.46975999999995
ylen_um:80.060129279999998
z_step:4.0
z_ret:10679
z_ret_nm:1751.356
x_dir:L_H
y_dir:L_H
fast_dir:Y
scan_type:DYN
exc_lvl:2
ac_gain:1
x_closed:False
y_closed:False
aborted:False
dummy:False
res_amp:7.0048065918974594
set_pt:1.7511253528648814
fadj:5.9540703440909439
ctrl_image:False
mag_phase:False
work_pt:3.5023498527001458
set_pt_per:25.000381475547417
work_pt_per:-49.999237048905165
xy_settle:100
z_settle:100
x_orig_um:210.04167183669236
y_orig_um:40.030064639999999