filename:TLM__MD_M017_S062_TARGET_EXPOSE_SCAN___COUNT_170004.DAT
scan_file:SCAN_MD_M017_S062_2015-06-26T123635Z_TGT13
sw_ver:664
start_time:"2015-06-26 12:36:35.544024"
end_time:"2015-06-26 20:24:19.553338"
duration:"7:47:44.009314"
channel:ZS
tip_num:10
lin_pos:-1.2857251850156406
tip_offset:78.48092622262908
wheel_pos:208
target:13
target_type:SOLGEL
x_orig:34004
y_orig:34004
xsteps:64
x_step:328
x_step_nm:1250.9395199999999
xlen_um:80.060129279999998
ysteps:64
y_step:328
y_step_nm:1250.9395199999999
ylen_um:80.060129279999998
z_step:4.0
z_ret:30511
z_ret_nm:5003.8040000000001
x_dir:L_H
y_dir:L_H
fast_dir:X
scan_type:DYN
exc_lvl:1
ac_gain:2
x_closed:False
y_closed:False
aborted:False
dummy:False
res_amp:3.339589532310979
set_pt:0.8346684977492943
fadj:1.5027084763866636
ctrl_image:False
mag_phase:False
work_pt:1.66976928672059
set_pt_per:25.000381475547417
work_pt_per:49.99923704890517
xy_settle:100
z_settle:100
x_orig_um:38.450861582629074
y_orig_um:40.030064639999999