filename:TLM__MD_M017_S062_TARGET_EXPOSE_SCAN___COUNT_170004.DAT
scan_file:SCAN_MD_M017_S062_2015-06-28T231148Z_TGT22
sw_ver:664
start_time:"2015-06-28 23:11:48.614018"
end_time:"2015-06-29 17:24:04.635767"
duration:"18:12:16.021749"
channel:ZS
tip_num:10
lin_pos:-1.321736476691844
tip_offset:15.461165789273076
wheel_pos:352
target:22
target_type:SOLGEL
x_orig:33972
y_orig:3984
xsteps:224
x_step:94
x_step_nm:358.50095999999996
xlen_um:80.304215040000003
ysteps:224
y_step:257
y_step_nm:356.94447300000002
ylen_um:79.955561952000011
z_step:4.0
z_ret:5028
z_ret_nm:824.59199999999998
x_dir:L_H
y_dir:L_H
fast_dir:Y
scan_type:DYN
exc_lvl:1
ac_gain:2
x_closed:False
y_closed:True
aborted:False
dummy:False
res_amp:3.3643091477836271
set_pt:0.67261768520637832
fadj:1.513694972152285
ctrl_image:False
mag_phase:False
work_pt:1.6821289058583369
set_pt_per:20.0
work_pt_per:-49.999237048905165
xy_settle:100
z_settle:100
x_orig_um:-24.690941730726919
y_orig_um:39.977780976000005