filename:TLM__MD_M017_S062_TARGET_EXPOSE_SCAN___COUNT_170004.DAT
scan_file:SCAN_MD_M017_S062_2015-06-30T000647Z_TGT22
sw_ver:664
start_time:"2015-06-30 00:06:47.643786"
end_time:"2015-06-30 18:20:29.665563"
duration:"18:13:42.021777"
channel:ZS
tip_num:10
lin_pos:-1.2854200045777067
tip_offset:79.014991989013438
wheel_pos:352
target:22
target_type:SOLGEL
x_orig:33972
y_orig:3984
xsteps:224
x_step:94
x_step_nm:358.50095999999996
xlen_um:80.304215040000003
ysteps:224
y_step:257
y_step_nm:356.94447300000002
ylen_um:79.955561952000011
z_step:4.0
z_ret:5028
z_ret_nm:824.59199999999998
x_dir:L_H
y_dir:L_H
fast_dir:Y
scan_type:DYN
exc_lvl:1
ac_gain:2
x_closed:False
y_closed:True
aborted:False
dummy:False
res_amp:3.3398947127489129
set_pt:0.66773479819943538
fadj:1.5027084763866636
ctrl_image:False
mag_phase:False
work_pt:1.669921874611179
set_pt_per:20.0
work_pt_per:-49.999237048905165
xy_settle:100
z_settle:100
x_orig_um:38.862884469013444
y_orig_um:39.977780976000005