filename:TLM__MD_M018_S063_TARGET_EXPOSE_SCAN___COUNT_180001.DAT
scan_file:SCAN_MD_M018_S063_2015-07-02T022914Z_TGT03
sw_ver:664
start_time:"2015-07-02 02:29:14.699271"
end_time:"2015-07-02 09:46:07.707888"
duration:"7:16:53.008617"
channel:ZS
tip_num:14
lin_pos:-4.847180895704585
tip_offset:-10.316567483023
wheel_pos:48
target:3
target_type:CAL
x_orig:43988
y_orig:32256
xsteps:256
x_step:4
x_step_nm:15.25536
xlen_um:3.9053721599999998
ysteps:256
y_step:4
y_step_nm:5.5555560000000002
ylen_um:1.4222223360000001
z_step:4.0
z_ret:372
z_ret_nm:61.008000000000003
x_dir:L_H
y_dir:L_H
fast_dir:Y
scan_type:DYN
exc_lvl:2
ac_gain:2
x_closed:False
y_closed:True
aborted:False
dummy:False
res_amp:6.8824292362859545
set_pt:1.3763637750820172
fadj:2.408789196612497
ctrl_image:False
mag_phase:False
work_pt:2.753076713652801
set_pt_per:20.0
work_pt_per:-40.00152590218967
xy_settle:150
z_settle:150
x_orig_um:-12.269253563023
y_orig_um:0.71111116800000007