filename:TLM__MD_M018_S063_TARGET_EXPOSE_SCAN___COUNT_180001.DAT
scan_file:SCAN_MD_M018_S063_2015-07-02T212215Z_TGT21
sw_ver:664
start_time:"2015-07-02 21:22:15.721617"
end_time:"2015-07-03 18:17:46.746378"
duration:"20:55:31.024761"
channel:ZS
tip_num:14
lin_pos:-4.847180895704585
tip_offset:-10.316567483023
wheel_pos:336
target:21
target_type:SOLGEL
x_orig:33972
y_orig:3984
xsteps:224
x_step:94
x_step_nm:358.50095999999996
xlen_um:80.304215040000003
ysteps:224
y_step:257
y_step_nm:356.94447300000002
ylen_um:79.955561952000011
z_step:4.0
z_ret:5465
z_ret_nm:896.25999999999999
x_dir:L_H
y_dir:L_H
fast_dir:Y
scan_type:DYN
exc_lvl:2
ac_gain:2
x_closed:False
y_closed:True
aborted:False
dummy:False
res_amp:6.9919890135042344
set_pt:1.39833676661326
fadj:2.4469367513542384
ctrl_image:False
mag_phase:False
work_pt:2.7969022963151526
set_pt_per:20.0
work_pt_per:-40.00152590218967
xy_settle:150
z_settle:150
x_orig_um:-50.468675003022994
y_orig_um:39.977780976000005