filename:TLM__MD_M018_S063_TARGET_EXPOSE_SCAN___COUNT_180001.DAT
scan_file:SCAN_MD_M018_S063_2015-07-05T172233Z_TGT21
sw_ver:664
start_time:"2015-07-05 17:22:33.802088"
end_time:"2015-07-06 17:56:07.831150"
duration:"1 day, 0:33:34.029062"
channel:ZS
tip_num:14
lin_pos:-4.8102540627145798
tip_offset:54.305390249486109
wheel_pos:336
target:21
target_type:SOLGEL
x_orig:34004
y_orig:3968
xsteps:256
x_step:82
x_step_nm:312.73487999999998
xlen_um:80.060129279999998
ysteps:256
y_step:225
y_step_nm:312.50002499999999
ylen_um:80.000006400000004
z_step:4.0
z_ret:4767
z_ret_nm:781.78800000000001
x_dir:L_H
y_dir:L_H
fast_dir:Y
scan_type:DYN
exc_lvl:2
ac_gain:2
x_closed:False
y_closed:True
aborted:False
dummy:False
res_amp:6.9626916914625774
set_pt:1.3925383382925154
fadj:2.4368657969024183
ctrl_image:False
mag_phase:False
work_pt:2.7851829204500107
set_pt_per:20.0
work_pt_per:-40.00152590218967
xy_settle:150
z_settle:150
x_orig_um:14.27532560948611
y_orig_um:40.000003200000002