filename:TLM__MD_M018_S064_TARGET_EXPOSE_SCAN___COUNT_180002.DAT
scan_file:SCAN_MD_M018_S064_2015-07-08T112608Z_TGT14
sw_ver:664
start_time:"2015-07-08 11:26:08.880258"
end_time:"2015-07-09 12:03:23.909392"
duration:"1 day, 0:37:15.029134"
channel:ZS
tip_num:9
lin_pos:-0.4412909132524605
tip_offset:-0.50909819180587623
wheel_pos:224
target:14
target_type:SOLGEL
x_orig:36626
y_orig:34004
xsteps:256
x_step:82
x_step_nm:312.73487999999998
xlen_um:80.060129279999998
ysteps:256
y_step:82
y_step_nm:312.73487999999998
ylen_um:80.060129279999998
z_step:4.0
z_ret:5721
z_ret_nm:938.24400000000003
x_dir:L_H
y_dir:L_H
fast_dir:X
scan_type:DYN
exc_lvl:4
ac_gain:7
x_closed:False
y_closed:False
aborted:False
dummy:False
res_amp:7.4201571679255363
set_pt:5.9360646982528422
fadj:6.3068589303425648
ctrl_image:False
mag_phase:False
work_pt:6.6780848389626319
set_pt_per:80.0
work_pt_per:-89.99923704890517
xy_settle:50
z_settle:50
x_orig_um:-30.539274351805876
y_orig_um:40.030064639999999