filename:TLM__MD_M018_S065_TARGET_EXPOSE_SCAN___COUNT_180003.DAT
scan_file:SCAN_MD_M018_S065_2015-07-15T063045Z_TGT10
sw_ver:664
start_time:"2015-07-15 06:30:45.073230"
end_time:"2015-07-15 10:23:29.077820"
duration:"3:52:44.004590"
channel:ZS
tip_num:5
lin_pos:3.0850690470740827
tip_offset:-79.879167620355219
wheel_pos:160
target:10
target_type:SOLGEL
x_orig:45000
y_orig:43000
xsteps:256
x_step:8
x_step_nm:30.510719999999999
xlen_um:7.8107443199999995
ysteps:256
y_step:8
y_step_nm:30.510719999999999
ylen_um:7.8107443199999995
z_step:4.0
z_ret:558
z_ret_nm:91.512
x_dir:L_H
y_dir:L_H
fast_dir:X
scan_type:DYN
exc_lvl:3
ac_gain:0
x_closed:False
y_closed:False
aborted:True
dummy:False
res_amp:0.9158464942397192
set_pt:0.18310826276035705
fadj:0.77821011673151752
ctrl_image:False
mag_phase:False
work_pt:0.8242548573548926
set_pt_per:20.0
work_pt_per:-89.99923704890517
xy_settle:100
z_settle:100
x_orig_um:-77.972247620355219
y_orig_um:5.7207599999999994