filename:TLM__MD_M018_S065_TARGET_EXPOSE_SCAN___COUNT_180003.DAT
scan_file:SCAN_MD_M018_S065_2015-07-15T164004Z_TGT21
sw_ver:664
start_time:"2015-07-15 16:40:04.085247"
end_time:"2015-07-16 17:13:18.118449"
duration:"1 day, 0:33:14.033202"
channel:ZS
tip_num:14
lin_pos:-4.7736324101625085
tip_offset:118.39328221561084
wheel_pos:336
target:21
target_type:SOLGEL
x_orig:34004
y_orig:3968
xsteps:256
x_step:82
x_step_nm:312.73487999999998
xlen_um:80.060129279999998
ysteps:256
y_step:225
y_step_nm:312.50002499999999
ylen_um:80.000006400000004
z_step:4.0
z_ret:4767
z_ret_nm:781.78800000000001
x_dir:L_H
y_dir:L_H
fast_dir:Y
scan_type:DYN
exc_lvl:2
ac_gain:2
x_closed:False
y_closed:True
aborted:False
dummy:False
res_amp:6.9340047302967882
set_pt:1.3867399099717708
fadj:2.4267948424505987
ctrl_image:False
mag_phase:False
work_pt:2.7737076982487268
set_pt_per:20.0
work_pt_per:-40.00152590218967
xy_settle:150
z_settle:150
x_orig_um:78.363217575610832
y_orig_um:40.000003200000002