filename:TLM__MD_M018_S065_TARGET_EXPOSE_SCAN___COUNT_180003.DAT
scan_file:SCAN_MD_M018_S065_2015-07-17T015232Z_TGT11
sw_ver:664
start_time:"2015-07-17 01:52:32.128984"
end_time:"2015-07-17 02:27:32.129695"
duration:"0:35:00.000711"
channel:ZS
tip_num:14
lin_pos:-4.8462653543907832
tip_offset:-8.7143701838698817
wheel_pos:176
target:11
target_type:SOLGEL
x_orig:34004
y_orig:34004
xsteps:64
x_step:328
x_step_nm:1250.9395199999999
xlen_um:80.060129279999998
ysteps:64
y_step:328
y_step_nm:1250.9395199999999
ylen_um:80.060129279999998
z_step:4.0
z_ret:1220
z_ret_nm:200.08000000000001
x_dir:L_H
y_dir:L_H
fast_dir:X
scan_type:DYN
exc_lvl:3
ac_gain:1
x_closed:False
y_closed:False
aborted:False
dummy:False
res_amp:9.999847409781033
set_pt:7.9996948195620661
fadj:8.4998855573357748
ctrl_image:False
mag_phase:False
work_pt:8.999786374857635
set_pt_per:80.0
work_pt_per:-89.99923704890517
xy_settle:100
z_settle:100
x_orig_um:-48.744434823869881
y_orig_um:40.030064639999999