filename:TLM__MD_M018_S065_TARGET_EXPOSE_SCAN___COUNT_180003.DAT
scan_file:SCAN_MD_M018_S065_2015-07-17T073954Z_TGT11
sw_ver:664
start_time:"2015-07-17 07:39:54.136033"
end_time:"2015-07-17 08:32:49.137106"
duration:"0:52:55.001073"
channel:ZS
tip_num:14
lin_pos:-4.847180895704585
tip_offset:-10.316567483023
wheel_pos:176
target:11
target_type:SOLGEL
x_orig:34004
y_orig:34004
xsteps:64
x_step:328
x_step_nm:1250.9395199999999
xlen_um:80.060129279999998
ysteps:64
y_step:328
y_step_nm:1250.9395199999999
ylen_um:80.060129279999998
z_step:4.0
z_ret:2439
z_ret_nm:399.99600000000004
x_dir:L_H
y_dir:L_H
fast_dir:X
scan_type:DYN
exc_lvl:3
ac_gain:1
x_closed:False
y_closed:False
aborted:False
dummy:False
res_amp:9.999847409781033
set_pt:2.4997329671168078
fadj:-6.000152590218967
ctrl_image:False
mag_phase:False
work_pt:4.499969481374112
set_pt_per:25.000381475547417
work_pt_per:-45.00038147554742
xy_settle:100
z_settle:100
x_orig_um:-50.346632123022999
y_orig_um:40.030064639999999