filename:TLM__MD_M018_S065_TARGET_EXPOSE_SCAN___COUNT_180003.DAT
scan_file:SCAN_MD_M018_S065_2015-07-17T110203Z_TGT10
sw_ver:664
start_time:"2015-07-17 11:02:03.140134"
end_time:"2015-07-17 14:03:00.143663"
duration:"3:00:57.003529"
channel:ZS
tip_num:10
lin_pos:-1.1795223926146334
tip_offset:264.33581292439158
wheel_pos:160
target:10
target_type:SOLGEL
x_orig:34004
y_orig:3968
xsteps:64
x_step:328
x_step_nm:1250.9395199999999
xlen_um:80.060129279999998
ysteps:64
y_step:900
y_step_nm:1250.0001
ylen_um:80.000006400000004
z_step:4.0
z_ret:22883
z_ret_nm:3752.8120000000004
x_dir:L_H
y_dir:L_H
fast_dir:Y
scan_type:DYN
exc_lvl:1
ac_gain:2
x_closed:False
y_closed:True
aborted:False
dummy:False
res_amp:3.2349126420996415
set_pt:0.80872816052491037
fadj:-8.7061875333791097
ctrl_image:False
mag_phase:False
work_pt:1.4557230293455488
set_pt_per:25.000381475547417
work_pt_per:-45.00038147554742
xy_settle:100
z_settle:100
x_orig_um:224.3057482843916
y_orig_um:40.000003200000002