filename:TLM__MD_M018_S065_TARGET_EXPOSE_SCAN___COUNT_180003.DAT scan_file:SCAN_MD_M018_S065_2015-07-19T175522Z_TGT12 sw_ver:664 start_time:"2015-07-19 17:55:22.206183" end_time:"2015-07-20 01:48:25.215686" duration:"7:53:03.009503" channel:ZS tip_num:10 lin_pos:-1.3507286182955673 tip_offset:-35.275082017242731 wheel_pos:192 target:12 target_type:SOLGEL x_orig:34004 y_orig:34004 xsteps:64 x_step:328 x_step_nm:1250.9395199999999 xlen_um:80.060129279999998 ysteps:64 y_step:328 y_step_nm:1250.9395199999999 ylen_um:80.060129279999998 z_step:4.0 z_ret:30511 z_ret_nm:5003.8040000000001 x_dir:L_H y_dir:L_H fast_dir:X scan_type:DYN exc_lvl:1 ac_gain:2 x_closed:False y_closed:False aborted:False dummy:False res_amp:3.278858625162127 set_pt:0.81971465629053175 fadj:-8.6884870679789419 ctrl_image:False mag_phase:False work_pt:1.4754988893668466 set_pt_per:25.000381475547417 work_pt_per:-45.00038147554742 xy_settle:150 z_settle:150 x_orig_um:-75.30514665724273 y_orig_um:40.030064639999999