filename:TLM__MD_M018_S065_TARGET_EXPOSE_SCAN___COUNT_180003.DAT
scan_file:SCAN_MD_M018_S065_2015-07-21T045816Z_TGT12
sw_ver:664
start_time:"2015-07-21 04:58:16.248426"
end_time:"2015-07-21 12:51:57.257941"
duration:"7:53:41.009515"
channel:ZS
tip_num:10
lin_pos:-1.4602883955138475
tip_offset:-227.00469214923297
wheel_pos:192
target:12
target_type:SOLGEL
x_orig:34004
y_orig:34004
xsteps:64
x_step:328
x_step_nm:1250.9395199999999
xlen_um:80.060129279999998
ysteps:64
y_step:328
y_step_nm:1250.9395199999999
ylen_um:80.060129279999998
z_step:4.0
z_ret:30511
z_ret_nm:5003.8040000000001
x_dir:L_H
y_dir:L_H
fast_dir:X
scan_type:DYN
exc_lvl:1
ac_gain:2
x_closed:False
y_closed:False
aborted:False
dummy:False
res_amp:3.312428473334859
set_pt:0.82795452811474779
fadj:-8.6750591287098491
ctrl_image:False
mag_phase:False
work_pt:1.4906054491053382
set_pt_per:25.000381475547417
work_pt_per:-45.00038147554742
xy_settle:150
z_settle:150
x_orig_um:-267.03475678923297
y_orig_um:40.030064639999999