filename:TLM__MD_M018_S066_TARGET_EXPOSE_SCAN___COUNT_180004.DAT
scan_file:SCAN_MD_M018_S066_2015-07-22T190909Z_TGT12
sw_ver:664
start_time:"2015-07-22 19:09:09.294445"
end_time:"2015-07-23 12:18:28.315121"
duration:"17:09:19.020676"
channel:ZS
tip_num:14
lin_pos:-4.8316166933699547
tip_offset:16.920786602580012
wheel_pos:192
target:12
target_type:SOLGEL
x_orig:50376
y_orig:33222
xsteps:288
x_step:22
x_step_nm:83.904479999999992
xlen_um:24.164490239999999
ysteps:288
y_step:22
y_step_nm:83.904479999999992
ylen_um:24.164490239999999
z_step:4.0
z_ret:1535
z_ret_nm:251.74000000000001
x_dir:L_H
y_dir:L_H
fast_dir:X
scan_type:DYN
exc_lvl:1
ac_gain:2
x_closed:False
y_closed:False
aborted:False
dummy:False
res_amp:3.2291142137788968
set_pt:0.80720225833524073
fadj:1.6144045166704815
ctrl_image:False
mag_phase:False
work_pt:1.4531137144816273
set_pt_per:25.000381475547417
work_pt_per:-45.00038147554742
xy_settle:150
z_settle:150
x_orig_um:39.330910442580006
y_orig_um:43.012487520000001