filename:TLM__MD_M018_S066_TARGET_EXPOSE_SCAN___COUNT_180004.DAT
scan_file:SCAN_MD_M018_S066_2015-07-23T201928Z_TGT02
sw_ver:664
start_time:"2015-07-23 20:19:28.324784"
end_time:"2015-07-24 01:02:22.330466"
duration:"4:42:54.005682"
channel:ZS
tip_num:16
lin_pos:-6.6102082856488895
tip_offset:-0.36449988555609103
wheel_pos:32
target:2
target_type:CAL
x_orig:43988
y_orig:31360
xsteps:256
x_step:4
x_step_nm:15.25536
xlen_um:3.9053721599999998
ysteps:256
y_step:11
y_step_nm:15.277779000000001
ylen_um:3.911111424
z_step:4.0
z_ret:186
z_ret_nm:30.504000000000001
x_dir:L_H
y_dir:L_H
fast_dir:Y
scan_type:DYN
exc_lvl:1
ac_gain:2
x_closed:False
y_closed:True
aborted:False
dummy:False
res_amp:4.0234988937209124
set_pt:1.0058747234302281
fadj:-8.3906309605554288
ctrl_image:False
mag_phase:False
work_pt:1.810589850838841
set_pt_per:25.000381475547417
work_pt_per:-45.00038147554742
xy_settle:100
z_settle:100
x_orig_um:-2.3171859655560909
y_orig_um:1.9555557120000002