filename:TLM__MD_M018_S066_TARGET_EXPOSE_SCAN___COUNT_180004.DAT scan_file:SCAN_MD_M018_S066_2015-07-24T102856Z_TGT13 sw_ver:664 start_time:"2015-07-24 10:28:56.341847" end_time:"2015-07-24 19:09:30.352304" duration:"8:40:34.010457" channel:ZS tip_num:10 lin_pos:-1.3220416571297779 tip_offset:14.927100022888704 wheel_pos:208 target:13 target_type:SOLGEL x_orig:34004 y_orig:34004 xsteps:64 x_step:328 x_step_nm:1250.9395199999999 xlen_um:80.060129279999998 ysteps:64 y_step:328 y_step_nm:1250.9395199999999 ylen_um:80.060129279999998 z_step:4.0 z_ret:30511 z_ret_nm:5003.8040000000001 x_dir:L_H y_dir:L_H fast_dir:X scan_type:DYN exc_lvl:1 ac_gain:2 x_closed:False y_closed:False aborted:True dummy:False res_amp:3.3188372625314719 set_pt:0.82948043030441754 fadj:1.4932478828107119 ctrl_image:True mag_phase:False work_pt:1.659393310160506 set_pt_per:25.000381475547417 work_pt_per:49.99923704890517 xy_settle:100 z_settle:100 x_orig_um:-25.102964617111297 y_orig_um:40.030064639999999