filename:TLM__MD_M018_S066_TARGET_EXPOSE_SCAN___COUNT_180004.DAT
scan_file:SCAN_MD_M018_S066_2015-07-25T081945Z_TGT22
sw_ver:664
start_time:"2015-07-25 08:19:45.368179"
end_time:"2015-07-26 03:53:33.391758"
duration:"19:33:48.023579"
channel:ZS
tip_num:10
lin_pos:-1.2857251850156406
tip_offset:78.48092622262908
wheel_pos:352
target:22
target_type:SOLGEL
x_orig:33972
y_orig:3984
xsteps:224
x_step:94
x_step_nm:358.50095999999996
xlen_um:80.304215040000003
ysteps:224
y_step:257
y_step_nm:356.94447300000002
ylen_um:79.955561952000011
z_step:4.0
z_ret:5028
z_ret_nm:824.59199999999998
x_dir:L_H
y_dir:L_H
fast_dir:Y
scan_type:DYN
exc_lvl:1
ac_gain:2
x_closed:False
y_closed:True
aborted:False
dummy:False
res_amp:3.314259555962463
set_pt:0.82856488899061576
fadj:-8.6744487678339812
ctrl_image:True
mag_phase:False
work_pt:1.4914294432728923
set_pt_per:25.000381475547417
work_pt_per:-45.00038147554742
xy_settle:150
z_settle:150
x_orig_um:38.328818702629079
y_orig_um:39.977780976000005