filename:TLM__MD_M019_S067_TARGET_EXPOSE_SCAN___COUNT_1900001.DAT
scan_file:SCAN_MD_M019_S067_2015-07-29T184640Z_TGT05
sw_ver:664
start_time:"2015-07-29 18:46:40.496478"
end_time:"2015-07-30 11:47:53.516991"
duration:"17:01:13.020513"
channel:ZS
tip_num:9
lin_pos:-0.40436408026245518
tip_offset:64.112859540703425
wheel_pos:80
target:5
target_type:SILICON
x_orig:34004
y_orig:3968
xsteps:256
x_step:82
x_step_nm:312.73487999999998
xlen_um:80.060129279999998
ysteps:256
y_step:225
y_step_nm:312.50002499999999
ylen_um:80.000006400000004
z_step:4.0
z_ret:3814
z_ret_nm:625.49599999999998
x_dir:L_H
y_dir:L_H
fast_dir:Y
scan_type:DYN
exc_lvl:4
ac_gain:7
x_closed:False
y_closed:True
aborted:False
dummy:False
res_amp:6.7878233005264361
set_pt:5.4300755321583889
fadj:5.769436179140917
ctrl_image:False
mag_phase:False
work_pt:6.108989182701606
set_pt_per:80.0
work_pt_per:-89.99923704890517
xy_settle:50
z_settle:50
x_orig_um:24.082794900703426
y_orig_um:40.000003200000002