filename:TLM__MD_M019_S067_TARGET_EXPOSE_SCAN___COUNT_1900001.DAT scan_file:SCAN_MD_M019_S067_2015-07-31T164917Z_TGT10 sw_ver:664 start_time:"2015-07-31 16:49:17.551972" end_time:"2015-07-31 22:28:23.558784" duration:"5:39:06.006812" channel:ZS tip_num:10 lin_pos:-1.1789120317387656 tip_offset:265.40394445716038 wheel_pos:160 target:10 target_type:SOLGEL x_orig:34004 y_orig:3968 xsteps:64 x_step:328 x_step_nm:1250.9395199999999 xlen_um:80.060129279999998 ysteps:64 y_step:900 y_step_nm:1250.0001 ylen_um:80.000006400000004 z_step:4.0 z_ret:22883 z_ret_nm:3752.8120000000004 x_dir:L_H y_dir:L_H fast_dir:Y scan_type:DYN exc_lvl:1 ac_gain:2 x_closed:False y_closed:True aborted:False dummy:False res_amp:3.2260624093995576 set_pt:0.80628671702143895 fadj:-8.7098496986343168 ctrl_image:False mag_phase:False work_pt:1.4517403908690372 set_pt_per:25.000381475547417 work_pt_per:-45.00038147554742 xy_settle:100 z_settle:100 x_orig_um:225.37387981716034 y_orig_um:40.000003200000002