filename:TLM__MD_M019_S067_TARGET_EXPOSE_SCAN___COUNT_1900001.DAT scan_file:SCAN_MD_M019_S067_2015-08-01T113208Z_TGT10 sw_ver:664 start_time:"2015-08-01 11:32:08.574528" end_time:"2015-08-01 16:39:05.580694" duration:"5:06:57.006166" channel:ZS tip_num:10 lin_pos:-1.3220416571297779 tip_offset:14.927100022888704 wheel_pos:159 target:10 target_type:SOLGEL x_orig:34004 y_orig:3968 xsteps:64 x_step:328 x_step_nm:1250.9395199999999 xlen_um:80.060129279999998 ysteps:64 y_step:900 y_step_nm:1250.0001 ylen_um:80.000006400000004 z_step:4.0 z_ret:22120 z_ret_nm:3627.6800000000003 x_dir:L_H y_dir:L_H fast_dir:Y scan_type:DYN exc_lvl:1 ac_gain:2 x_closed:False y_closed:True aborted:False dummy:False res_amp:1.2625314717326619 set_pt:0.31555657282368199 fadj:-9.4950789654383154 ctrl_image:False mag_phase:False work_pt:0.568143978528541 set_pt_per:25.000381475547417 work_pt_per:-45.00038147554742 xy_settle:100 z_settle:100 x_orig_um:-25.102964617111297 y_orig_um:-144.08000152870204