filename:TLM__MD_M019_S067_TARGET_EXPOSE_SCAN___COUNT_1900001.DAT
scan_file:SCAN_MD_M019_S067_2015-08-01T203536Z_TGT10
sw_ver:664
start_time:"2015-08-01 20:35:36.585445"
end_time:"2015-08-02 01:49:41.591754"
duration:"5:14:05.006309"
channel:ZS
tip_num:10
lin_pos:-1.3220416571297779
tip_offset:14.927100022888704
wheel_pos:161
target:10
target_type:SOLGEL
x_orig:34004
y_orig:3968
xsteps:64
x_step:328
x_step_nm:1250.9395199999999
xlen_um:80.060129279999998
ysteps:64
y_step:900
y_step_nm:1250.0001
ylen_um:80.000006400000004
z_step:4.0
z_ret:22120
z_ret_nm:3627.6800000000003
x_dir:L_H
y_dir:L_H
fast_dir:Y
scan_type:DYN
exc_lvl:1
ac_gain:2
x_closed:False
y_closed:True
aborted:False
dummy:False
res_amp:1.4224460212100405
set_pt:0.35553521019302664
fadj:-9.4312962539101246
ctrl_image:False
mag_phase:False
work_pt:0.6401061358282644
set_pt_per:25.000381475547417
work_pt_per:-45.00038147554742
xy_settle:100
z_settle:100
x_orig_um:-25.102964617111297
y_orig_um:224.08000792870206