filename:TLM__MD_M019_S067_TARGET_EXPOSE_SCAN___COUNT_1900001.DAT
scan_file:SCAN_MD_M019_S067_2015-08-02T074848Z_TGT05
sw_ver:664
start_time:"2015-08-02 07:48:48.598968"
end_time:"2015-08-03 00:51:21.619509"
duration:"17:02:33.020541"
channel:ZS
tip_num:9
lin_pos:-0.4412909132524605
tip_offset:-0.50909819180587623
wheel_pos:80
target:5
target_type:SILICON
x_orig:34004
y_orig:3968
xsteps:256
x_step:82
x_step_nm:312.73487999999998
xlen_um:80.060129279999998
ysteps:256
y_step:225
y_step_nm:312.50002499999999
ylen_um:80.000006400000004
z_step:4.0
z_ret:3814
z_ret_nm:625.49599999999998
x_dir:L_H
y_dir:L_H
fast_dir:Y
scan_type:DYN
exc_lvl:4
ac_gain:7
x_closed:False
y_closed:True
aborted:False
dummy:False
res_amp:7.2489509422446021
set_pt:5.799038681620508
fadj:6.1615930418860154
ctrl_image:False
mag_phase:False
work_pt:6.524000542069565
set_pt_per:80.0
work_pt_per:-89.99923704890517
xy_settle:50
z_settle:50
x_orig_um:-40.539162831805875
y_orig_um:40.000003200000002