filename:TLM__MD_M019_S067_TARGET_EXPOSE_SCAN___COUNT_1900001.DAT
scan_file:SCAN_MD_M019_S067_2015-08-04T065435Z_TGT21
sw_ver:664
start_time:"2015-08-04 06:54:35.655731"
end_time:"2015-08-04 17:30:23.668503"
duration:"10:35:48.012772"
channel:ZS
tip_num:14
lin_pos:-4.847180895704585
tip_offset:-10.316567483023
wheel_pos:336
target:21
target_type:SOLGEL
x_orig:39252
y_orig:18432
xsteps:256
x_step:41
x_step_nm:156.36743999999999
xlen_um:40.030064639999999
ysteps:256
y_step:112
y_step_nm:155.55556799999999
ylen_um:39.822225408000001
z_step:4.0
z_ret:2193
z_ret_nm:359.65199999999999
x_dir:L_H
y_dir:L_H
fast_dir:Y
scan_type:DYN
exc_lvl:2
ac_gain:2
x_closed:False
y_closed:True
aborted:False
dummy:False
res_amp:7.0298313878080414
set_pt:1.4059662775616082
fadj:2.4603646906233312
ctrl_image:False
mag_phase:False
work_pt:2.812039823474293
set_pt_per:20.0
work_pt_per:-40.00152590218967
xy_settle:50
z_settle:50
x_orig_um:-30.331599803023
y_orig_um:19.911112704000001