filename:TLM__MD_M019_S068_TARGET_EXPOSE_SCAN___COUNT_1900002.DAT
scan_file:SCAN_MD_M019_S068_2015-08-05T071633Z_TGT21
sw_ver:664
start_time:"2015-08-05 07:16:33.685099"
end_time:"2015-08-05 20:17:40.700790"
duration:"13:01:07.015691"
channel:ZS
tip_num:14
lin_pos:-4.8838025482566572
tip_offset:-74.4044594491493
wheel_pos:336
target:21
target_type:SOLGEL
x_orig:42068
y_orig:25958
xsteps:512
x_step:5
x_step_nm:19.069199999999999
xlen_um:9.763430399999999
ysteps:512
y_step:14
y_step_nm:19.444445999999999
ylen_um:9.9555563520000003
z_step:4.0
z_ret:237
z_ret_nm:38.868000000000002
x_dir:L_H
y_dir:L_H
fast_dir:Y
scan_type:DYN
exc_lvl:2
ac_gain:2
x_closed:False
y_closed:True
aborted:False
dummy:False
res_amp:6.9321736476691846
set_pt:1.7328145265888457
fadj:-7.2272831311512933
ctrl_image:False
mag_phase:False
work_pt:3.119504585998504
set_pt_per:25.000381475547417
work_pt_per:-45.00038147554742
xy_settle:60
z_settle:60
x_orig_um:-83.679718329149296
y_orig_um:9.458334090000001