filename:TLM__MD_M019_S068_TARGET_EXPOSE_SCAN___COUNT_1900002.DAT
scan_file:SCAN_MD_M019_S068_2015-08-06T140000Z_TGT21
sw_ver:664
start_time:"2015-08-06 14:00:00.722130"
end_time:"2015-08-07 01:38:20.736158"
duration:"11:38:20.014028"
channel:ZS
tip_num:14
lin_pos:-4.8838025482566572
tip_offset:-74.4044594491493
wheel_pos:336
target:21
target_type:SOLGEL
x_orig:42068
y_orig:32410
xsteps:512
x_step:5
x_step_nm:19.069199999999999
xlen_um:9.763430399999999
ysteps:512
y_step:14
y_step_nm:19.444445999999999
ylen_um:9.9555563520000003
z_step:4.0
z_ret:237
z_ret_nm:38.868000000000002
x_dir:L_H
y_dir:L_H
fast_dir:Y
scan_type:DYN
exc_lvl:2
ac_gain:2
x_closed:False
y_closed:True
aborted:False
dummy:False
res_amp:6.9541466392004274
set_pt:1.7383077744716564
fadj:-7.2184328984512094
ctrl_image:False
mag_phase:False
work_pt:3.129392516009153
set_pt_per:25.000381475547417
work_pt_per:-45.00038147554742
xy_settle:50
z_settle:50
x_orig_um:-83.679718329149296
y_orig_um:0.49722226200000003