filename:TLM__MD_M019_S068_TARGET_EXPOSE_SCAN___COUNT_1900002.DAT
scan_file:SCAN_MD_M019_S068_2015-08-08T073726Z_TGT21
sw_ver:664
start_time:"2015-08-08 07:37:26.767797"
end_time:"2015-08-08 18:57:14.781275"
duration:"11:19:48.013478"
channel:ZS
tip_num:14
lin_pos:-4.8838025482566572
tip_offset:-74.4044594491493
wheel_pos:336
target:21
target_type:SOLGEL
x_orig:39252
y_orig:18432
xsteps:256
x_step:41
x_step_nm:156.36743999999999
xlen_um:40.030064639999999
ysteps:256
y_step:112
y_step_nm:155.55556799999999
ylen_um:39.822225408000001
z_step:4.0
z_ret:1907
z_ret_nm:312.74799999999999
x_dir:L_H
y_dir:L_H
fast_dir:Y
scan_type:DYN
exc_lvl:2
ac_gain:2
x_closed:False
y_closed:True
aborted:False
dummy:False
res_amp:6.9706263828488595
set_pt:1.7425803006027314
fadj:-7.2120241092545969
ctrl_image:False
mag_phase:False
work_pt:3.1368084635171396
set_pt_per:25.000381475547417
work_pt_per:-45.00038147554742
xy_settle:100
z_settle:100
x_orig_um:-94.419491769149303
y_orig_um:19.911112704000001