filename:TLM__MD_M019_S068_TARGET_EXPOSE_SCAN___COUNT_1900002.DAT
scan_file:SCAN_MD_M019_S068_2015-08-08T231032Z_TGT21
sw_ver:664
start_time:"2015-08-08 23:10:32.786297"
end_time:"2015-08-09 10:34:06.799850"
duration:"11:23:34.013553"
channel:ZS
tip_num:14
lin_pos:-4.8099488822766459
tip_offset:54.839456015870482
wheel_pos:336
target:21
target_type:SOLGEL
x_orig:39252
y_orig:18432
xsteps:256
x_step:41
x_step_nm:156.36743999999999
xlen_um:40.030064639999999
ysteps:256
y_step:112
y_step_nm:155.55556799999999
ylen_um:39.822225408000001
z_step:4.0
z_ret:1907
z_ret_nm:312.74799999999999
x_dir:L_H
y_dir:L_H
fast_dir:Y
scan_type:DYN
exc_lvl:2
ac_gain:2
x_closed:False
y_closed:True
aborted:False
dummy:False
res_amp:6.9514000152590221
set_pt:1.7376974135957886
fadj:-7.2196536202029451
ctrl_image:False
mag_phase:False
work_pt:3.1281565247578214
set_pt_per:25.000381475547417
work_pt_per:-45.00038147554742
xy_settle:100
z_settle:100
x_orig_um:34.824423695870479
y_orig_um:19.911112704000001