filename:TLM__MD_M020_S072_TARGET_EXPOSE_SCAN___COUNT_200002.DAT
scan_file:SCAN_MD_M020_S072_2015-09-04T052603Z_TGT22
sw_ver:664
start_time:"2015-09-04 05:26:03.544237"
end_time:"2015-09-04 17:37:09.559041"
duration:"12:11:06.014804"
channel:ZS
tip_num:14
lin_pos:-4.8102540627145798
tip_offset:54.305390249486109
wheel_pos:352
target:22
target_type:SOLGEL
x_orig:44372
y_orig:32410
xsteps:512
x_step:5
x_step_nm:19.069199999999999
xlen_um:9.763430399999999
ysteps:512
y_step:14
y_step_nm:19.444445999999999
ylen_um:9.9555563520000003
z_step:4.0
z_ret:237
z_ret_nm:38.868000000000002
x_dir:L_H
y_dir:L_H
fast_dir:Y
scan_type:DYN
exc_lvl:2
ac_gain:2
x_closed:False
y_closed:True
aborted:False
dummy:False
res_amp:6.9340047302967882
set_pt:1.7334248874647136
fadj:-7.2266727702754254
ctrl_image:False
mag_phase:False
work_pt:3.1203285801660576
set_pt_per:25.000381475547417
work_pt_per:-45.00038147554742
xy_settle:50
z_settle:50
x_orig_um:53.817218729486108
y_orig_um:0.49722226200000003