filename:TLM__MD_M020_S072_TARGET_EXPOSE_SCAN___COUNT_200002.DAT
scan_file:SCAN_MD_M020_S072_2015-09-05T074551Z_TGT02
sw_ver:664
start_time:"2015-09-05 07:45:51.576226"
end_time:"2015-09-05 21:32:49.592971"
duration:"13:46:58.016745"
channel:ZS
tip_num:10
lin_pos:-1.3220416571297779
tip_offset:14.927100022888704
wheel_pos:32
target:2
target_type:CAL
x_orig:39252
y_orig:18432
xsteps:256
x_step:41
x_step_nm:156.36743999999999
xlen_um:40.030064639999999
ysteps:256
y_step:112
y_step_nm:155.55556799999999
ylen_um:39.822225408000001
z_step:4.0
z_ret:1907
z_ret_nm:312.74799999999999
x_dir:L_H
y_dir:L_H
fast_dir:Y
scan_type:DYN
exc_lvl:1
ac_gain:3
x_closed:False
y_closed:True
aborted:False
dummy:False
res_amp:1.8725871671625849
set_pt:0.46814679179064622
fadj:-9.2512397955291075
ctrl_image:False
mag_phase:False
work_pt:0.8426713686853101
set_pt_per:25.000381475547417
work_pt_per:-45.00038147554742
xy_settle:100
z_settle:100
x_orig_um:-5.0879322971112941
y_orig_um:19.911112704000001