filename:TLM__MD_M020_S072_TARGET_EXPOSE_SCAN___COUNT_200002.DAT
scan_file:SCAN_MD_M020_S072_2015-09-05T231459Z_TGT02
sw_ver:664
start_time:"2015-09-05 23:14:59.595040"
end_time:"2015-09-06 11:31:58.609962"
duration:"12:16:59.014922"
channel:ZS
tip_num:10
lin_pos:-1.2845044632639049
tip_offset:80.617189288166557
wheel_pos:32
target:2
target_type:CAL
x_orig:39252
y_orig:18432
xsteps:256
x_step:41
x_step_nm:156.36743999999999
xlen_um:40.030064639999999
ysteps:256
y_step:112
y_step_nm:155.55556799999999
ylen_um:39.822225408000001
z_step:4.0
z_ret:1907
z_ret_nm:312.74799999999999
x_dir:L_H
y_dir:L_H
fast_dir:Y
scan_type:DYN
exc_lvl:1
ac_gain:3
x_closed:False
y_closed:True
aborted:False
dummy:False
res_amp:2.6938277256427865
set_pt:0.67322804608224618
fadj:-8.9225604638742659
ctrl_image:False
mag_phase:False
work_pt:1.2122327528333168
set_pt_per:25.000381475547417
work_pt_per:-45.00038147554742
xy_settle:100
z_settle:100
x_orig_um:60.602156968166554
y_orig_um:19.911112704000001