filename:TLM__MD_M021_S075_TARGET_EXPOSE_SCAN___COUNT_2100001.DAT
scan_file:SCAN_MD_M021_S075_2015-09-25T053347Z_TGT06
sw_ver:664
start_time:"2015-09-25 05:33:47.139792"
end_time:"2015-09-25 14:46:50.150715"
duration:"9:13:03.010923"
channel:ZS
tip_num:8
lin_pos:0.44098573281452658
tip_offset:-60.024967574578497
wheel_pos:96
target:6
target_type:SILICON
x_orig:43492
y_orig:41620
xsteps:288
x_step:7
x_step_nm:26.69688
xlen_um:7.68870144
ysteps:288
y_step:20
y_step_nm:76.276799999999994
ylen_um:21.967718399999999
z_step:4.0
z_ret:698
z_ret_nm:114.47200000000001
x_dir:L_H
y_dir:L_H
fast_dir:Y
scan_type:CON
exc_lvl:6
ac_gain:3
x_closed:False
y_closed:False
aborted:False
dummy:False
res_amp:0.17578393224994279
set_pt:0.087891966124971396
fadj:0.149233234149691
ctrl_image:False
mag_phase:False
work_pt:0.15820419787951287
set_pt_per:50.000762951094835
work_pt_per:-89.99923704890517
xy_settle:100
z_settle:100
x_orig_um:-63.869318294578498
y_orig_um:10.983859199999999