filename:TLM__MD_M021_S075_TARGET_EXPOSE_SCAN___COUNT_2100001.DAT
scan_file:SCAN_MD_M021_S075_2015-09-26T072736Z_TGT06
sw_ver:664
start_time:"2015-09-26 07:27:36.170482"
end_time:"2015-09-26 16:13:02.180860"
duration:"8:45:26.010378"
channel:ZS
tip_num:8
lin_pos:0.44190127412832836
tip_offset:-58.422770275425378
wheel_pos:96
target:6
target_type:SILICON
x_orig:40670
y_orig:34286
xsteps:224
x_step:18
x_step_nm:68.649119999999996
xlen_um:15.37740288
ysteps:224
y_step:48
y_step_nm:183.06432000000001
ylen_um:41.006407680000002
z_step:4.0
z_ret:1674
z_ret_nm:274.536
x_dir:L_H
y_dir:L_H
fast_dir:Y
scan_type:CON
exc_lvl:6
ac_gain:3
x_closed:False
y_closed:False
aborted:False
dummy:False
res_amp:0.1739528496223392
set_pt:0.0869764248111696
fadj:0.14770733196002137
ctrl_image:False
mag_phase:False
work_pt:0.1565562374849346
set_pt_per:50.000762951094835
work_pt_per:-89.99923704890517
xy_settle:100
z_settle:100
x_orig_um:-73.029777475425377
y_orig_um:38.954561759999997