filename:TLM__MD_M021_S076_TARGET_EXPOSE_SCAN___COUNT_2100002.DAT
scan_file:SCAN_MD_M021_S076_2015-10-03T073521Z_TGT06
sw_ver:664
start_time:"2015-10-03 07:35:21.360917"
end_time:"2015-10-03 09:27:16.363093"
duration:"1:51:55.002176"
channel:ZS
tip_num:8
lin_pos:0.44098573281452658
tip_offset:-60.024967574578497
wheel_pos:96
target:6
target_type:SILICON
x_orig:40670
y_orig:34286
xsteps:224
x_step:18
x_step_nm:68.649119999999996
xlen_um:15.37740288
ysteps:224
y_step:48
y_step_nm:183.06432000000001
ylen_um:41.006407680000002
z_step:4.0
z_ret:4018
z_ret_nm:658.952
x_dir:L_H
y_dir:L_H
fast_dir:Y
scan_type:CON
exc_lvl:6
ac_gain:3
x_closed:False
y_closed:False
aborted:False
dummy:False
res_amp:0.17639429312581065
set_pt:0.088197146562905324
fadj:0.14984359502555886
ctrl_image:False
mag_phase:False
work_pt:0.15875351801103896
set_pt_per:50.000762951094835
work_pt_per:-89.99923704890517
xy_settle:50
z_settle:50
x_orig_um:-74.631974774578495
y_orig_um:38.954561759999997