filename:TLM__MD_M021_S076_TARGET_EXPOSE_SCAN___COUNT_2100002.DAT
scan_file:SCAN_MD_M021_S076_2015-10-06T093206Z_TGT06
sw_ver:664
start_time:"2015-10-06 09:32:06.447187"
end_time:"2015-10-06 21:20:00.460952"
duration:"11:47:54.013765"
channel:ZS
tip_num:8
lin_pos:0.44098573281452658
tip_offset:-60.024967574578497
wheel_pos:96
target:6
target_type:SILICON
x_orig:43492
y_orig:41620
xsteps:288
x_step:7
x_step_nm:26.69688
xlen_um:7.68870144
ysteps:288
y_step:20
y_step_nm:76.276799999999994
ylen_um:21.967718399999999
z_step:4.0
z_ret:1674
z_ret_nm:274.536
x_dir:L_H
y_dir:L_H
fast_dir:Y
scan_type:CON
exc_lvl:6
ac_gain:3
x_closed:False
y_closed:False
aborted:False
dummy:False
res_amp:0.1770046540016785
set_pt:0.088502327000839251
fadj:0.15045395590142671
ctrl_image:False
mag_phase:False
work_pt:0.15930283814256505
set_pt_per:50.000762951094835
work_pt_per:-89.99923704890517
xy_settle:50
z_settle:50
x_orig_um:-63.869318294578498
y_orig_um:10.983859199999999