filename:TLM__MD_M021_S077_TARGET_EXPOSE_SCAN___COUNT_2100003.DAT
scan_file:SCAN_MD_M021_S077_2015-10-10T082353Z_TGT21
sw_ver:664
start_time:"2015-10-10 08:23:53.557860"
end_time:"2015-10-11 05:15:38.582200"
duration:"20:51:45.024340"
channel:ZS
tip_num:14
lin_pos:-4.8096437018387119
tip_offset:55.373521782254855
wheel_pos:336
target:21
target_type:SOLGEL
x_orig:33972
y_orig:3984
xsteps:224
x_step:94
x_step_nm:358.50095999999996
xlen_um:80.304215040000003
ysteps:224
y_step:257
y_step_nm:356.94447300000002
ylen_um:79.955561952000011
z_step:4.0
z_ret:5465
z_ret_nm:896.25999999999999
x_dir:L_H
y_dir:L_H
fast_dir:Y
scan_type:DYN
exc_lvl:2
ac_gain:2
x_closed:False
y_closed:True
aborted:False
dummy:False
res_amp:7.0075532158388647
set_pt:1.7517357137407492
fadj:-7.1970702677958345
ctrl_image:False
mag_phase:False
work_pt:3.1534256792294797
set_pt_per:25.000381475547417
work_pt_per:-45.00038147554742
xy_settle:150
z_settle:150
x_orig_um:15.221414262254861
y_orig_um:39.977780976000005