filename:TLM__MD_M021_S077_TARGET_EXPOSE_SCAN___COUNT_2100003.DAT
scan_file:SCAN_MD_M021_S077_2015-10-11T131715Z_TGT21
sw_ver:664
start_time:"2015-10-11 13:17:15.591565"
end_time:"2015-10-11 21:06:49.600695"
duration:"7:49:34.009130"
channel:ZS
tip_num:14
lin_pos:-4.9198138399328606
tip_offset:-137.42421988250527
wheel_pos:336
target:21
target_type:SOLGEL
x_orig:34004
y_orig:3968
xsteps:64
x_step:328
x_step_nm:1250.9395199999999
xlen_um:80.060129279999998
ysteps:64
y_step:900
y_step_nm:1250.0001
ylen_um:80.000006400000004
z_step:4.0
z_ret:30511
z_ret_nm:5003.8040000000001
x_dir:L_H
y_dir:L_H
fast_dir:Y
scan_type:DYN
exc_lvl:2
ac_gain:2
x_closed:False
y_closed:True
aborted:False
dummy:False
res_amp:7.0212863355458914
set_pt:1.7550926985580224
fadj:-7.1915770199130238
ctrl_image:False
mag_phase:False
work_pt:3.1596056354861357
set_pt_per:25.000381475547417
work_pt_per:-45.00038147554742
xy_settle:150
z_settle:150
x_orig_um:-177.45428452250528
y_orig_um:40.000003200000002