filename:TLM__MD_M021_S077_TARGET_EXPOSE_SCAN___COUNT_2100003.DAT
scan_file:SCAN_MD_M021_S077_2015-10-12T121101Z_TGT22
sw_ver:664
start_time:"2015-10-12 12:11:01.618277"
end_time:"2015-10-13 08:58:02.642524"
duration:"20:47:01.024247"
channel:ZS
tip_num:14
lin_pos:-4.847180895704585
tip_offset:-10.316567483023
wheel_pos:352
target:22
target_type:SOLGEL
x_orig:33972
y_orig:3984
xsteps:224
x_step:94
x_step_nm:358.50095999999996
xlen_um:80.304215040000003
ysteps:224
y_step:257
y_step_nm:356.94447300000002
ylen_um:79.955561952000011
z_step:4.0
z_ret:5465
z_ret_nm:896.25999999999999
x_dir:L_H
y_dir:L_H
fast_dir:Y
scan_type:DYN
exc_lvl:2
ac_gain:2
x_closed:False
y_closed:True
aborted:False
dummy:False
res_amp:7.0112153810940718
set_pt:1.752651255054551
fadj:-7.1955443656061648
ctrl_image:False
mag_phase:False
work_pt:3.155073667564588
set_pt_per:25.000381475547417
work_pt_per:-45.00038147554742
xy_settle:150
z_settle:150
x_orig_um:-50.468675003022994
y_orig_um:39.977780976000005