filename:TLM__MD_M021_S077_TARGET_EXPOSE_SCAN___COUNT_2100003.DAT
scan_file:SCAN_MD_M021_S077_2015-10-13T163350Z_TGT22
sw_ver:664
start_time:"2015-10-13 16:33:50.651387"
end_time:"2015-10-13 22:22:13.658161"
duration:"5:48:23.006774"
channel:ZS
tip_num:14
lin_pos:-4.8105592431525137
tip_offset:53.771324483101736
wheel_pos:352
target:22
target_type:SOLGEL
x_orig:34004
y_orig:3968
xsteps:64
x_step:328
x_step_nm:1250.9395199999999
xlen_um:80.060129279999998
ysteps:64
y_step:900
y_step_nm:1250.0001
ylen_um:80.000006400000004
z_step:4.0
z_ret:22120
z_ret_nm:3627.6800000000003
x_dir:L_H
y_dir:L_H
fast_dir:Y
scan_type:DYN
exc_lvl:2
ac_gain:2
x_closed:False
y_closed:True
aborted:False
dummy:False
res_amp:7.0078583962767986
set_pt:1.7517357137407492
fadj:-7.1970702677958345
ctrl_image:False
mag_phase:False
work_pt:3.153563011590739
set_pt_per:25.000381475547417
work_pt_per:-45.00038147554742
xy_settle:150
z_settle:150
x_orig_um:13.741259843101737
y_orig_um:40.000003200000002