filename:TLM__MD_M021_S078_TARGET_EXPOSE_SCAN___COUNT_2100004.DAT
scan_file:SCAN_MD_M021_S078_2015-10-14T080823Z_TGT10
sw_ver:664
start_time:"2015-10-14 08:08:23.669559"
end_time:"2015-10-15 02:58:43.691538"
duration:"18:50:20.021979"
channel:ZS
tip_num:10
lin_pos:-1.1792172121766995
tip_offset:264.86987869077598
wheel_pos:160
target:10
target_type:SOLGEL
x_orig:34000
y_orig:0
xsteps:256
x_step:51
x_step_nm:194.50584000000001
xlen_um:49.793495040000003
ysteps:256
y_step:141
y_step_nm:195.833349
ylen_um:50.133337343999997
z_step:4.0
z_ret:3582
z_ret_nm:587.44799999999998
x_dir:L_H
y_dir:L_H
fast_dir:Y
scan_type:DYN
exc_lvl:1
ac_gain:3
x_closed:False
y_closed:True
aborted:False
dummy:False
res_amp:2.0685130083161671
set_pt:0.51697566186007482
fadj:-9.1728084229800864
ctrl_image:False
mag_phase:False
work_pt:0.9308387446135972
set_pt_per:25.000381475547417
work_pt_per:-45.00038147554742
xy_settle:100
z_settle:100
x_orig_um:224.82455869077597
y_orig_um:45.511114752000005