filename:TLM__MD_M021_S078_TARGET_EXPOSE_SCAN___COUNT_2100004.DAT
scan_file:SCAN_MD_M021_S078_2015-10-15T100452Z_TGT10
sw_ver:664
start_time:"2015-10-15 10:04:52.699824"
end_time:"2015-10-16 03:09:07.719740"
duration:"17:04:15.019916"
channel:ZS
tip_num:10
lin_pos:-1.292439154650187
tip_offset:66.731479362172877
wheel_pos:159
target:10
target_type:SOLGEL
x_orig:34000
y_orig:3968
xsteps:192
x_step:73
x_step_nm:278.41032000000001
xlen_um:53.454781440000005
ysteps:288
y_step:200
y_step_nm:277.77780000000001
ylen_um:80.000006400000004
z_step:4.0
z_ret:6790
z_ret_nm:1113.5599999999999
x_dir:L_H
y_dir:L_H
fast_dir:Y
scan_type:DYN
exc_lvl:1
ac_gain:3
x_closed:False
y_closed:True
aborted:False
dummy:False
res_amp:2.1841763942931256
set_pt:0.54596780346379792
fadj:-9.1264209964141294
ctrl_image:False
mag_phase:False
work_pt:0.9828877095307632
set_pt_per:25.000381475547417
work_pt_per:-45.00038147554742
xy_settle:100
z_settle:100
x_orig_um:26.686159362172873
y_orig_um:-144.08000152870204