filename:TLM__MD_M022_S079_TARGET_EXPOSE_SCAN___COUNT_2200001.DAT
scan_file:SCAN_MD_M022_S079_2015-10-21T082209Z_TGT21
sw_ver:664
start_time:"2015-10-21 08:22:09.865827"
end_time:"2015-10-22 04:31:44.889346"
duration:"20:09:35.023519"
channel:ZS
tip_num:14
lin_pos:-4.9201190203707945
tip_offset:-137.95828564888967
wheel_pos:336
target:21
target_type:SOLGEL
x_orig:33972
y_orig:3984
xsteps:224
x_step:94
x_step_nm:358.50095999999996
xlen_um:80.304215040000003
ysteps:224
y_step:257
y_step_nm:356.94447300000002
ylen_um:79.955561952000011
z_step:4.0
z_ret:5246
z_ret_nm:860.34400000000005
x_dir:L_H
y_dir:L_H
fast_dir:Y
scan_type:DYN
exc_lvl:2
ac_gain:2
x_closed:False
y_closed:True
aborted:False
dummy:False
res_amp:7.0319676508735789
set_pt:1.7578393224994278
fadj:-7.1873044937819488
ctrl_image:False
mag_phase:False
work_pt:3.164412268130201
set_pt_per:25.000381475547417
work_pt_per:-45.00038147554742
xy_settle:150
z_settle:150
x_orig_um:-178.11039316888966
y_orig_um:39.977780976000005