filename:TLM__MD_M022_S079_TARGET_EXPOSE_SCAN___COUNT_2200001.DAT
scan_file:SCAN_MD_M022_S079_2015-10-23T142935Z_TGT02
sw_ver:664
start_time:"2015-10-23 14:29:35.928971"
end_time:"2015-10-23 20:54:11.936450"
duration:"6:24:36.007479"
channel:ZS
tip_num:14
lin_pos:-4.8465705348287171
tip_offset:-9.2484359502542546
wheel_pos:32
target:2
target_type:CAL
x_orig:43060
y_orig:31328
xsteps:192
x_step:15
x_step_nm:57.207599999999999
xlen_um:10.983859199999999
ysteps:192
y_step:15
y_step_nm:20.833335000000002
ylen_um:4.0000003199999998
z_step:4.0
z_ret:1395
z_ret_nm:228.78
x_dir:L_H
y_dir:L_H
fast_dir:Y
scan_type:DYN
exc_lvl:2
ac_gain:2
x_closed:False
y_closed:True
aborted:False
dummy:False
res_amp:6.9001297016861223
set_pt:1.7248798352025636
fadj:-7.2401007095445182
ctrl_image:False
mag_phase:False
work_pt:3.105084688066307
set_pt_per:25.000381475547417
work_pt_per:-45.00038147554742
xy_settle:150
z_settle:150
x_orig_um:-14.740365550254253
y_orig_um:2.0000001600000004