filename:TLM__MD_M022_S079_TARGET_EXPOSE_SCAN___COUNT_2200001.DAT
scan_file:SCAN_MD_M022_S079_2015-10-25T124900Z_TGT21
sw_ver:664
start_time:"2015-10-25 12:49:00.983015"
end_time:"2015-10-26 09:40:18.007346"
duration:"20:51:17.024331"
channel:ZS
tip_num:14
lin_pos:-4.8105592431525137
tip_offset:53.771324483101736
wheel_pos:336
target:21
target_type:SOLGEL
x_orig:33972
y_orig:3984
xsteps:224
x_step:94
x_step_nm:358.50095999999996
xlen_um:80.304215040000003
ysteps:224
y_step:257
y_step_nm:356.94447300000002
ylen_um:79.955561952000011
z_step:4.0
z_ret:5465
z_ret_nm:896.25999999999999
x_dir:L_H
y_dir:L_H
fast_dir:Y
scan_type:DYN
exc_lvl:2
ac_gain:2
x_closed:False
y_closed:True
aborted:False
dummy:False
res_amp:7.0081635767147326
set_pt:1.7520408941786831
fadj:-7.1967650873579005
ctrl_image:False
mag_phase:False
work_pt:3.153700343951998
set_pt_per:25.000381475547417
work_pt_per:-45.00038147554742
xy_settle:150
z_settle:150
x_orig_um:13.619216963101742
y_orig_um:39.977780976000005